Andreja Jelen: Nanoscience Using FIB-SEM Nanolaboratory
Source: Monday physics colloquium
Nanoscience Using FIB-SEM Nanolaboratory
Dr. Andreja Jelen
Jožef Stefan Institute, Condensed Matter Physics Dept., Ljubljana
FIB-SEM (Focused Ion Beam ‒ Scanning Electron Microscope) nanolaboratory is a versatile tool for interacting with solid materials at the micro and nano level. It is a dual beam scanning electron microscope that operates with focused electrons e- and focused ions, usually Ga+. Mostly performed activities in FIB-SEM nanolaboratory are: imaging at the nanoscale, cross-sectioning, EDS (Energy Dispersive Spectroscopy) chemical analysis, nanotomography, 3D reconstruction of materials microstructure, nanofabrication and TEM (Transmission Electron Microscope) thin foil samples preparation. The purpose of this talk is to give a brief description of FIB-SEM dual beam system and present some results on high-entropy alloy materials.
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